Challenges in nanofabrication for efficient optical metasurfaces

Abstract Optical metasurfaces have raised immense expectations as cheaper and lighter alternatives to bulk optical components. In recent years, novel components combining multiple optical functions have been proposed pushing further the level of requirement on the manufacturing precision of these ob...

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Bibliographic Details
Main Authors: Adelin Patoux, Gonzague Agez, Christian Girard, Vincent Paillard, Peter R. Wiecha, Aurélie Lecestre, Franck Carcenac, Guilhem Larrieu, Arnaud Arbouet
Format: Article
Language:English
Published: Nature Publishing Group 2021-03-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-021-84666-z