Challenges in nanofabrication for efficient optical metasurfaces
Abstract Optical metasurfaces have raised immense expectations as cheaper and lighter alternatives to bulk optical components. In recent years, novel components combining multiple optical functions have been proposed pushing further the level of requirement on the manufacturing precision of these ob...
Main Authors: | Adelin Patoux, Gonzague Agez, Christian Girard, Vincent Paillard, Peter R. Wiecha, Aurélie Lecestre, Franck Carcenac, Guilhem Larrieu, Arnaud Arbouet |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2021-03-01
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Series: | Scientific Reports |
Online Access: | https://doi.org/10.1038/s41598-021-84666-z |
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