Piezoelectric Analysis of Saw Sensor Using Finite Element Method
In this contribution modeling and simulation of surface acoustic waves (SAW) sensor using finite element method will be presented. SAW sensor is made from piezoelectric GaN layer and SiC substrate. Two different analysis types are investigated - modal and transient. Both analyses are only 2D. The go...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
VSB-Technical University of Ostrava
2013-06-01
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| Series: | Transactions of the VSB : Technical University of Ostrava |
| Subjects: | |
| Online Access: | http://transactions.fs.vsb.cz/2013-1/1932.pdf |