Piezoelectric Analysis of Saw Sensor Using Finite Element Method

Piezoelectric Analysis of Saw Sensor Using Finite Element Method

In this contribution modeling and simulation of surface acoustic waves (SAW) sensor using finite element method will be presented. SAW sensor is made from piezoelectric GaN layer and SiC substrate. Two different analysis types are investigated - modal and transient. Both analyses are only 2D. The go...

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Bibliographic Details
Main Authors: Vladimír KUTIŠ, Gabriel GÁLIK, Ivan RÝGER, Justín MURÍN, Juraj HRABOVSKÝ, Juraj PAULECH, Tibor LALINSKÝ
Format: Article
Language:English
Published: VSB-Technical University of Ostrava 2013-06-01
Series:Transactions of the VSB : Technical University of Ostrava
Subjects:
SAW sensor
MEMS
piezoelectric material
FEM analysis
modal analysis
transient analysis
Online Access:http://transactions.fs.vsb.cz/2013-1/1932.pdf
Description
Summary:In this contribution modeling and simulation of surface acoustic waves (SAW) sensor using finite element method will be presented. SAW sensor is made from piezoelectric GaN layer and SiC substrate. Two different analysis types are investigated - modal and transient. Both analyses are only 2D. The goal of modal analysis, is to determine the eigenfrequency of SAW, which is used in following transient analysis. In transient analysis, wave propagation in SAW sensor is investigated. Both analyses were performed using FEM code ANSYS.
ISSN:1210-0471
1804-0993

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