Au induced lateral crystallization of amorphous Ge with stress stimulation at 130 ○C

Au induced lateral crystallization of amorphous Ge with stress stimulation at 130 ○C

The effect of stress stimulation on gold (Au) induced lateral crystallization (GILC) of amorphous Ge on insulating substrates is investigated. As a result, the GILC is significantly enhanced by using compressive residual stresses of up to 200 MPa in TEOS-SiO2. In addition, it is found that the annea...

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Bibliographic Details
Main Authors: Taiki Nishijima, Satoshi Shimizu, Kinta Kusano, Kazuki Kudo, Masahiro Furuta, Yutaka Kusuda, Shinichi Motoyama, Nobuyuki Naka, Tomoko Numata, Kenichiro Takakura, Isao Tsunoda
Format: Article
Language:English
Published: AIP Publishing LLC 2020-05-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0004326

Internet

http://dx.doi.org/10.1063/5.0004326

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