Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO Nanolaminates

Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO Nanolaminates

Abstract This report mainly focuses on the investigation of morphological, optical, and electrical properties of Al2O3/ZnO nanolaminates regulated by varying bilayer thicknesses. The growth mechanism of nanolaminates based on atomic layer deposition and Al penetration into ZnO layer are proposed. Th...

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Bibliographic Details
Main Authors: Da-Hai Li, Chen-Hui Zhai, Wen-Chao Zhou, Qing-Hua Huang, Lei Wang, Hua Zheng, Lei Chen, Xin Chen, Rong-Jun Zhang
Format: Article
Language:English
Published: SpringerOpen 2017-10-01
Series:Nanoscale Research Letters
Subjects:
Al2O3/ZnO nanolaminates
Atomic layer deposition
Morphological properties
Optical properties
Electrical properties
Online Access:http://link.springer.com/article/10.1186/s11671-017-2328-x

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http://link.springer.com/article/10.1186/s11671-017-2328-x

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