Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO Nanolaminates
Abstract This report mainly focuses on the investigation of morphological, optical, and electrical properties of Al2O3/ZnO nanolaminates regulated by varying bilayer thicknesses. The growth mechanism of nanolaminates based on atomic layer deposition and Al penetration into ZnO layer are proposed. Th...
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doaj-097fe6e9a57d42f9a472687fa88f21ba2020-11-24T21:35:56ZengSpringerOpenNanoscale Research Letters1931-75731556-276X2017-10-011211910.1186/s11671-017-2328-xEffects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO NanolaminatesDa-Hai Li0Chen-Hui Zhai1Wen-Chao Zhou2Qing-Hua Huang3Lei Wang4Hua Zheng5Lei Chen6Xin Chen7Rong-Jun Zhang8Key Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Department of Optical Science and Engineering, Fudan UniversityKey Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Department of Optical Science and Engineering, Fudan UniversityState Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of SciencesInstitute of Electronic Engineering, China Academy of Engineering PhysicsInstitute of Electronic Engineering, China Academy of Engineering PhysicsKey Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Department of Optical Science and Engineering, Fudan UniversityInstitute of Electronic Engineering, China Academy of Engineering PhysicsNational Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of SciencesKey Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Department of Optical Science and Engineering, Fudan UniversityAbstract This report mainly focuses on the investigation of morphological, optical, and electrical properties of Al2O3/ZnO nanolaminates regulated by varying bilayer thicknesses. The growth mechanism of nanolaminates based on atomic layer deposition and Al penetration into ZnO layer are proposed. The surface roughness of Al2O3/ZnO nanolaminates can be controlled due to the smooth effect of interposed Al2O3 layers. The thickness, optical constants, and bandgap information of nanolaminates have been investigated by spectroscopic ellipsometry measurement. The band gap and absorption edge have a blue shift with decreasing the bilayer thickness on account of the Burstein-Moss effect, the quantum confinement effect and the characteristic evolution of nanolaminates. Also, the carrier concentrations and resistivities are found to be modified considerably among various bilayer thicknesses. The modulations of these properties are vital for Al2O3/ZnO nanolaminates to be used as transparent conductor and high resistance layer in optoelectronic applications.http://link.springer.com/article/10.1186/s11671-017-2328-xAl2O3/ZnO nanolaminatesAtomic layer depositionMorphological propertiesOptical propertiesElectrical properties |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Da-Hai Li Chen-Hui Zhai Wen-Chao Zhou Qing-Hua Huang Lei Wang Hua Zheng Lei Chen Xin Chen Rong-Jun Zhang |
spellingShingle |
Da-Hai Li Chen-Hui Zhai Wen-Chao Zhou Qing-Hua Huang Lei Wang Hua Zheng Lei Chen Xin Chen Rong-Jun Zhang Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO Nanolaminates Nanoscale Research Letters Al2O3/ZnO nanolaminates Atomic layer deposition Morphological properties Optical properties Electrical properties |
author_facet |
Da-Hai Li Chen-Hui Zhai Wen-Chao Zhou Qing-Hua Huang Lei Wang Hua Zheng Lei Chen Xin Chen Rong-Jun Zhang |
author_sort |
Da-Hai Li |
title |
Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO Nanolaminates |
title_short |
Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO Nanolaminates |
title_full |
Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO Nanolaminates |
title_fullStr |
Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO Nanolaminates |
title_full_unstemmed |
Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO Nanolaminates |
title_sort |
effects of bilayer thickness on the morphological, optical, and electrical properties of al2o3/zno nanolaminates |
publisher |
SpringerOpen |
series |
Nanoscale Research Letters |
issn |
1931-7573 1556-276X |
publishDate |
2017-10-01 |
description |
Abstract This report mainly focuses on the investigation of morphological, optical, and electrical properties of Al2O3/ZnO nanolaminates regulated by varying bilayer thicknesses. The growth mechanism of nanolaminates based on atomic layer deposition and Al penetration into ZnO layer are proposed. The surface roughness of Al2O3/ZnO nanolaminates can be controlled due to the smooth effect of interposed Al2O3 layers. The thickness, optical constants, and bandgap information of nanolaminates have been investigated by spectroscopic ellipsometry measurement. The band gap and absorption edge have a blue shift with decreasing the bilayer thickness on account of the Burstein-Moss effect, the quantum confinement effect and the characteristic evolution of nanolaminates. Also, the carrier concentrations and resistivities are found to be modified considerably among various bilayer thicknesses. The modulations of these properties are vital for Al2O3/ZnO nanolaminates to be used as transparent conductor and high resistance layer in optoelectronic applications. |
topic |
Al2O3/ZnO nanolaminates Atomic layer deposition Morphological properties Optical properties Electrical properties |
url |
http://link.springer.com/article/10.1186/s11671-017-2328-x |
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