A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices
This research explores a new ATE (Automatic Testing Equipment) method for Micro Electro Mechanical Systems (MEMS) devices. In this method, microscale aerodynamic drag force is generated on a movable part of a MEMS sensor from a micronozzle hole located a specific distance above the chip that will re...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-03-01
|
| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/9/2/24 |