OPTICAL PERFORMANCES OF SILICON DIOXIDE THIN FILMS RECEIVED BY DIRECT DEPOSITION FROM ION BEAMS
Influence of fractional pressure of monosilane and argon intermixture and substrate temperature on optical performances of thin-film coatings from the silicon dioxide, received by direct deposition from ion beams on substrates from a glass and silicon with use of the end Hall accelerator as a ion so...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/598 |