Computational Fluid Dynamics (CFD) Simulations and Experimental Measurements in an Inductively-Coupled Plasma Generator Operating at Atmospheric Pressure: Performance Analysis and Parametric Study

: In this article, electrical characteristics of a high-power inductively-coupled plasma (ICP) torch operating at 3 MHz are determined by direct measurement of radio-frequency (RF) current and voltage together with energy balance in the system. The variation of impedance with two parameters, namely...

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Bibliographic Details
Main Authors: Sangeeta B. Punjabi, Dilip N. Barve, Narendra K. Joshi, Asoka K. Das, Dushyant C. Kothari, Arijit A. Ganguli, Sunil N. Sahasrabhude, Jyeshtharaj B. Joshi
Format: Article
Language:English
Published: MDPI AG 2019-03-01
Series:Processes
Subjects:
Online Access:http://www.mdpi.com/2227-9717/7/3/133