Hollow polydimethylsiloxane (PDMS) foam with a 3D interconnected network for highly sensitive capacitive pressure sensors

Abstract We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stiffness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high po...

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Bibliographic Details
Main Authors: Dong Hwan Kim, Young Jung, Kyungkuk Jung, Dong Hwa Kwak, Dong Min Park, Myung Gyu Shin, Hyeong Jun Tak, Jong Soo Ko
Format: Article
Language:English
Published: SpringerOpen 2020-12-01
Series:Micro and Nano Systems Letters
Subjects:
Online Access:https://doi.org/10.1186/s40486-020-00127-8