Support Loss and Q Factor Enhancement for a Rocking Mass Microgyroscope
A rocking mass gyroscope (RMG) is a kind of vibrating mass gyroscope with high sensitivity, whose driving mode and sensing mode are completely uniform. MEMS RMG devices are a research hotspot now because they have the potential to be used in space applications. Support loss is the dominant energy lo...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2011-10-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/11/10/9807/ |