Study on the Thermal Conductivity Characteristics for Ultra-Thin Body FD SOI MOSFETs Based on Phonon Scattering Mechanisms

Study on the Thermal Conductivity Characteristics for Ultra-Thin Body FD SOI MOSFETs Based on Phonon Scattering Mechanisms

The silicon-on-insulator (SOI) metal-oxide-semiconductor field-effect transistors (MOSFETs) suffer intensive self-heating effects due to the reduced thermal conductivity of the silicon layer while the feature sizes of devices scale down to the nanometer regime. In this work, analytical models of the...

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Bibliographic Details
Main Authors: Guohe Zhang, Junhua Lai, Yali Su, Binhong Li, Bo Li, Jianhui Bu, Cheng-Fu Yang
Format: Article
Language:English
Published: MDPI AG 2019-08-01
Series:Materials
Subjects:
UTB-FD SOI MOSFET
self-heating effect
thermal conductivity
phonon scattering
heat diffusion
Online Access:https://www.mdpi.com/1996-1944/12/16/2601

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https://www.mdpi.com/1996-1944/12/16/2601

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