Effect of reactive gas composition on properties of Si/LiNbO3 heterojunctions grown by radio-frequency magnetron sputtering
Amorphous lithium niobate (LiNbO3) films were deposited onto silicon substrates by the radio-frequency magnetron sputtering method in a pure Ar environment and an Ar + O2 gas mixture with various oxygen contents. The oxide charge existing in as-grown films has two components: the positive +Qox distr...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-12-01
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| Series: | Journal of Science: Advanced Materials and Devices |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2468217920300666 |