Adhesion Studies of CrC/a-C:H Coatings Deposited with Anode Assisted Reactive Magnetron Sputtering Combined with DC-Pulsed Plasma Enhanced Chemical Vapor Deposition

Adhesion Studies of CrC/a-C:H Coatings Deposited with Anode Assisted Reactive Magnetron Sputtering Combined with DC-Pulsed Plasma Enhanced Chemical Vapor Deposition

We studied the effect of CrC interlayers with different carbon contents on the adhesion of CrC/a-C:H coatings prepared by anode assisted reactive magnetron sputtering combined with DC-pulsed plasma enhanced chemical vapor deposition. The adhesion of the coating was measured by indentation and scratc...

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Bibliographic Details
Main Authors: Zhihong Huang, Zhijie Chen, Wenchang Lang, Xianghong Wang
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Materials
Subjects:
a-C:H
interlayer
adhesion
anode assisted
magnetron sputtering
plasma-enhanced chemical vapor deposition
Online Access:https://www.mdpi.com/1996-1944/14/11/2954

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https://www.mdpi.com/1996-1944/14/11/2954

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