Effects of Methyl Terminal and Carbon Bridging Groups Ratio on Critical Properties of Porous Organosilicate-Glass Films

Effects of Methyl Terminal and Carbon Bridging Groups Ratio on Critical Properties of Porous Organosilicate-Glass Films

Organosilicate glass-based porous low dielectic constant films with different ratios of terminal methyl to bridging organic (methylene, ethylene and 1,4-phenylene) groups are spin-on deposited by using a mixture of alkylenesiloxane with organic bridges and methyltrimethoxysilane, followed by soft ba...

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Bibliographic Details
Main Authors: Alexey S. Vishnevskiy, Sergej Naumov, Dmitry S. Seregin, Yu-Hsuan Wu, Wei-Tsung Chuang, Md. Rasadujjaman, Jing Zhang, Jihperng Leu, Konstantin A. Vorotilov, Mikhail R. Baklanov
Format: Article
Language:English
Published: MDPI AG 2020-10-01
Series:Materials
Subjects:
organosilicate glass
low-<i>k</i> films
carbon bridges
pore structure
ellipsometric porosimetry
FTIR
Online Access:https://www.mdpi.com/1996-1944/13/20/4484

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https://www.mdpi.com/1996-1944/13/20/4484

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