Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography

Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography

This article concerns the characterization of the stability and performance of a motorized stage used in laser direct writing lithography. The system was built from commercial components and commanded by G-code. Measurements use a pseudo-periodic-pattern (PPP) observed by a camera and image processi...

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Bibliographic Details
Main Authors: Juan Jaramillo, Artur Zarzycki, July Galeano, Patrick Sandoz
Format: Article
Language:English
Published: MDPI AG 2017-01-01
Series:Sensors
Subjects:
laser direct writing
photolithography
microfabrication
G-Code
high-resolution positioning
xy-stage
Online Access:http://www.mdpi.com/1424-8220/17/2/278

Internet

http://www.mdpi.com/1424-8220/17/2/278

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