A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing

A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing

This paper presents a low-power hybrid thermopneumatic microvalve with an electrostatic hold and integrated valve plate position sensing. This combination of actuators in a single structure enables a high throw and force actuator with low energy consumption, a combination that is difficult to otherw...

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Bibliographic Details
Main Authors: Kensall D. Wise, Joseph A. Potkay
Format: Article
Language:English
Published: MDPI AG 2012-04-01
Series:Micromachines
Subjects:
microvalve
thermopneumatic
electrostatic
low power
µGC
hybrid actuator
Online Access:http://www.mdpi.com/2072-666X/3/2/379

Internet

http://www.mdpi.com/2072-666X/3/2/379

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