Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner

Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner

This paper presents a positioning error model and a control compensation scheme for a six-degree-of-freedom (6-DOF) micro-positioner based on a compliant mechanism and piezoelectric actuators (PZT). The positioning error model is established by means of the kinematic model of the compliant mechanism...

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Bibliographic Details
Main Authors: Chao Lin, Shan Zheng, Pingyang Li, Zhonglei Shen, Shuang Wang
Format: Article
Language:English
Published: MDPI AG 2019-08-01
Series:Micromachines
Subjects:
compliant mechanism
positioning error model
hysteresis nonlinearity
control compensation
micro-positioner
Online Access:https://www.mdpi.com/2072-666X/10/8/542

Internet

https://www.mdpi.com/2072-666X/10/8/542

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