Fabrication of AZO TCO Films by RF-sputtering and Their Physical Properties
We report on the fabrication of Al-doped ZnO (AZO) transparent-conductive oxide (TCO) films on glass substrates by RF-sputtering, their physical properties, and the effect of thermal annealing on the AZO TCO films. The AZO films on glass substrates have a preferred orientation of the c-axis, irrespe...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2016-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20167801106 |