Microcantilevers for Sensing Applications
Microelectromechanical Systems (MEMS) (1–2) has come into existence only in the last decade. Microcantilevers are the most simplified MEMS based devices. Diverse applications of microcantilevers in the field of sensors have been explored by researchers. Several groups have also shown the possibility...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2010-04-01
|
| Series: | Measurement + Control |
| Online Access: | https://doi.org/10.1177/002029401004300305 |