Plasma-Assisted Chemical Vapor Deposition of F-Doped MnO<sub>2</sub> Nanostructures on Single Crystal Substrates

MnO<sub>2</sub> nanostructures were fabricated by plasma assisted-chemical vapor deposition (PA-CVD) using a fluorinated diketonate diamine manganese complex, acting as single-source precursor for both Mn and F. The syntheses were performed from Ar/O<sub>2</sub> plasmas on Mg...

Full description

Bibliographic Details
Main Authors: Lorenzo Bigiani, Chiara Maccato, Alberto Gasparotto, Cinzia Sada, Elza Bontempi, Davide Barreca
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/10/7/1335