Plasma-Assisted Chemical Vapor Deposition of F-Doped MnO<sub>2</sub> Nanostructures on Single Crystal Substrates
MnO<sub>2</sub> nanostructures were fabricated by plasma assisted-chemical vapor deposition (PA-CVD) using a fluorinated diketonate diamine manganese complex, acting as single-source precursor for both Mn and F. The syntheses were performed from Ar/O<sub>2</sub> plasmas on Mg...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-07-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/10/7/1335 |