The measuring technique developed to evaluate the thermal diffusivity of the multi-layered thin film specimens

In the present study, the thermal diffusivities of the Al, Si and ITO films deposited on the SUS304 steel substrate are evaluated via the present technique. Before applying this technique, the temperature for the thin film of the multi-layered specimen is developed theoretically for the one- dimensi...

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Bibliographic Details
Main Authors: Li Tse-Chang, Li Yang-Ru, Lin Jen-Fin
Format: Article
Language:English
Published: EDP Sciences 2017-01-01
Series:MATEC Web of Conferences
Online Access:https://doi.org/10.1051/matecconf/201712300026