Translational MEMS Platform for Planar Optical Switching Fabrics

Translational MEMS Platform for Planar Optical Switching Fabrics

While 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex structures, the wafer bonding processes involved,...

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Bibliographic Details
Main Authors: Suraj Sharma, Niharika Kohli, Jonathan Brière, Michaël Ménard, Frederic Nabki
Format: Article
Language:English
Published: MDPI AG 2019-06-01
Series:Micromachines
Subjects:
microelectromechanical systems (MEMS)
electrostatic actuator
parallel plate actuation
optical switch
silicon-on-insulator (SOI)
micro-platform
optical waveguide
silicon nitride photonics
integrated optics
Online Access:https://www.mdpi.com/2072-666X/10/7/435

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https://www.mdpi.com/2072-666X/10/7/435

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