Modeling of Spring Constant and Pull-in Voltage of T-Shaped Radio Frequency Microelectromechanical (RF-MEMS) Cantilever Switch
This paper presents the design and simulation of a low actuation voltage microelectromechanical system (MEMS) switch for high-frequency applications. Low pull-in voltage and low spring constant of the switch were achieved by using T-shape microcantilever of specific dimension. The modelling indicate...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2011-12-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/december_2011/P_896.pdf |