Effect of size and shape on reflective properties of silicon nanocone arrays
In order to investigate the optical properties of silicon nanocone arrays with different sizes and shapes, the nanocone arrays are fabricated on silicon substrate by submicron dry etching process masked by self-assembled nano-particles. The morphology and optical properties of the nano-cone arrays a...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Hebei University of Science and Technology
2018-12-01
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| Series: | Journal of Hebei University of Science and Technology |
| Subjects: | |
| Online Access: | http://xuebao.hebust.edu.cn/hbkjdx/ch/reader/create_pdf.aspx?file_no=b201806002&flag=1&journal_ |