Multilayer microhydraulic actuators with speed and force configurations
Abstract Electrostatic motors have traditionally required high voltage and provided low torque, leaving them with a vanishingly small portion of the motor application space. The lack of robust electrostatic motors is of particular concern in microsystems because inductive motors do not scale well to...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-03-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-021-00240-7 |