Effects of CF<sub>4</sub> Plasma Treatment on Indium Gallium Oxide and Ti-doped Indium Gallium Oxide Sensing Membranes in Electrolyte–Insulator–Semiconductors

Effects of CF<sub>4</sub> Plasma Treatment on Indium Gallium Oxide and Ti-doped Indium Gallium Oxide Sensing Membranes in Electrolyte–Insulator–Semiconductors

Electrolyte–insulator–semiconductor (EIS) sensors, used in applications such as pH sensing and sodium ion sensing, are the most basic type of ion-sensitive field-effect transistor (ISFET) membranes. Currently, some of the most popular techniques for synthesizing such sensors are chemical vapor depos...

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Bibliographic Details
Main Authors: Chyuan-Haur Kao, Yen-Lin Su, Wei-Jen Liao, Ming-Hsien Li, Wei-Lun Chan, Shang-Che Tsai, Hsiang Chen
Format: Article
Language:English
Published: MDPI AG 2020-09-01
Series:Crystals
Subjects:
IGO
Ti doping
membranes
CF<sub>4</sub> plasma treatment
pH sensing biosensors
Online Access:https://www.mdpi.com/2073-4352/10/9/810

Internet

https://www.mdpi.com/2073-4352/10/9/810

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