Polymer-based flexible and multi-directional tactile sensor with multiple NiCr piezoresistors
Abstract A polymer-based tactile sensor with flexibility and multi-directional sensing capability is presented. The proposed sensor consists of a polydimethylsiloxane (PDMS) bump, a polyimide (PI) substrate, Cr/Au electrode lines for electrical connection, NiCr piezoresistors, and an SU-8 support st...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2019-05-01
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Series: | Micro and Nano Systems Letters |
Subjects: | |
Online Access: | http://link.springer.com/article/10.1186/s40486-019-0085-6 |