The Effect of the Anisotropy of Single Crystal Silicon on the Frequency Split of Vibrating Ring Gyroscopes

The Effect of the Anisotropy of Single Crystal Silicon on the Frequency Split of Vibrating Ring Gyroscopes

This paper analyzes the effect of the anisotropy of single crystal silicon on the frequency split of the vibrating ring gyroscope, operated in the <inline-formula> <math display="inline"> <semantics> <mrow> <mi>n</mi> <mo>=</mo> <mn>2&l...

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Bibliographic Details
Main Authors: Zhengcheng Qin, Yang Gao, Jia Jia, Xukai Ding, Libin Huang, Hongsheng Li
Format: Article
Language:English
Published: MDPI AG 2019-02-01
Series:Micromachines
Subjects:
single crystal silicon
anisotropy
vibrating ring gyroscope
frequency split
Online Access:https://www.mdpi.com/2072-666X/10/2/126

Internet

https://www.mdpi.com/2072-666X/10/2/126

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