Lubrication of sliding silicon MEMS devices using ferrofluids‐based magnetic matrix texture
Abstract This paper aims to explore the possibility of using ferrofluids for the lubrication of MEMS devices under the influence of different magnetic field texture configurations. For the investigation of proposed work, a novel silicon‐based pin‐on‐disk friction pair is designed in such a way that...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2021-01-01
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| Series: | Micro & Nano Letters |
| Online Access: | https://doi.org/10.1049/mna2.12007 |