Automated Control of Plasma Ion-Assisted Electron Beam-Deposited TiO2 Optical Thin Films

Automated Control of Plasma Ion-Assisted Electron Beam-Deposited TiO2 Optical Thin Films

A hollow cathode plasma source has been operated automatically, demonstrating independent control of plasma ion energy and ion current density for plasma ion-assisted electron beam-deposited titania (TiO2). The lanthanum hexaboride hollow cathode design described in this work utilizes both the inter...

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Bibliographic Details
Main Authors: Bing Hui, Xiuhua Fu, Des Gibson, David Child, Shigeng Song, Lewis Fleming, Guntis Rutins, Hin on Chu, Caspar Clark, Stuart Reid
Format: Article
Language:English
Published: MDPI AG 2018-08-01
Series:Coatings
Subjects:
plasma ion source
Titania
refractive index
accelerator current
accelerator voltage
Online Access:http://www.mdpi.com/2079-6412/8/8/272

Internet

http://www.mdpi.com/2079-6412/8/8/272

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