Research on Hybrid Isolation System for Micro-Nano-Fabrication Platform
In order to obtain better vibration suppression effect, this paper designs a semiactive/fully active hybrid isolator by using magnetorheological elastomer (MRE) and piezoelectric material. Combined with multimode control scheme, full frequency vibration suppression is achieved. Firstly, series type...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2014-06-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1155/2014/243247 |