A tilt compensation system for translation micromirror
A tilt compensation system is presented in this article to compensate the tilt in the translation micromirror used in miniaturized Fourier transform infrared spectrometers. This compensation system can not only be used for the micromirror tested in this article but also be applicable to any translat...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2018-08-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814018789781 |