Analysis on Chattering Phenomena by the Tilt of the Proof Mass in MEMS Switch
This paper reports an analysis on the relationship between the tilt of the proof mass in MEMS switch and the chattering phenomena. Low-g MEMS acceleration switch developed by Kim’s group was modelled in 2D and displacements of each end of the proof mass were analysed using RK 4th method. Some elemen...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-08-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/1/4/349 |