Design and Test of Capacitive Micromachined Ultrasonic Transducer
Currently, most capacitive micromachined ultrasound transducers, adopting surface sacrificial technology encounter various problems such as difficult cavity etch, low controllability of membrane thickness etc., and their operating frequencies are more concentrated in several MHz bandwidths that cann...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2014-09-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/september_2014/Vol_178/P_2345.pdf |