Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation

Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation

We show that planar nanopatterned thin films on standard polycarbonate (PC) compact discs (CD) can be micro-shaped in a non-contact manner via direct e-beam exposure. The shape of the film can be controlled by proper selection of the e-beam parameters. As an example of application, we demonstrate a...

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Bibliographic Details
Main Authors: Carlos Angulo Barrios, Víctor Canalejas-Tejero
Format: Article
Language:English
Published: MDPI AG 2016-04-01
Series:Micromachines
Subjects:
micro/nanopatterning
electron-beam lithography
polycarbonate
compact disk
micro-optics
microfluidics
lab-on-CD
Online Access:http://www.mdpi.com/2072-666X/7/4/66

Internet

http://www.mdpi.com/2072-666X/7/4/66

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