Error Analysis, Design and Modeling of an Improved Heterodyne Nano-Displacement Interferometer
A new heterodyne nano-displacement with error reduction is presented. The main errors affecting the displacement accuracy of the nano-displacement measurement system including intermodulation distortion error, cross-talk error, cross-polarization error and phase detection error are calculated. In th...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Iran University of Science and Technology
2007-07-01
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| Series: | Iranian Journal of Electrical and Electronic Engineering |
| Subjects: | |
| Online Access: | http://ijeee.iust.ac.ir/browse.php?a_code=A-10-3-25&slc_lang=en&sid=1 |