A Lever Coupling Mechanism in Dual-Mass Micro-Gyroscopes for Improving the Shock Resistance along the Driving Direction

A Lever Coupling Mechanism in Dual-Mass Micro-Gyroscopes for Improving the Shock Resistance along the Driving Direction

This paper presents the design and application of a lever coupling mechanism to improve the shock resistance of a dual-mass silicon micro-gyroscope with drive mode coupled along the driving direction without sacrificing the mechanical sensitivity. Firstly, the mechanical sensitivity and the shock re...

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Bibliographic Details
Main Authors: Yang Gao, Hongsheng Li, Libin Huang, Hui Sun
Format: Article
Language:English
Published: MDPI AG 2017-04-01
Series:Sensors
Subjects:
coupling mechanism
MEMS
shock resistance
mechanical design
silicon micro-gyroscope
Online Access:http://www.mdpi.com/1424-8220/17/5/995

Internet

http://www.mdpi.com/1424-8220/17/5/995

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