Effects of axial magnetic field on discharge characteristics of inductively coupled plasma
To study the effects of an axial magnetic field on the discharge characteristics of Ar inductively coupled plasma, a set of discharge plasma generators was designed. The plasma parameters such as electron temperature and electron density were diagnosed with a Langmuir probe. The research showed that...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-05-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5133831 |