On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers
This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The an...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-08-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/19/17/3770 |