Measurement of friction force between two mica surfaces with multiple beam interferometry
Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2010-06-01
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| Series: | EPJ Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/epjconf/20100606002 |