Fabrication of large-scale micro-structures by two-photon polymerization with a long-stroke precision stage
This article demonstrates the fabrication of large-scale micro-structures by two-photon polymerization with an integrated long-stroke precision stage. We first design a three-axial stage that combines a piezoelectric transducer stage and a stepper-motor stage, and we apply gain-scheduling and robust...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2017-04-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814017695757 |