A stochastic model of solid state thin film deposition: Application to chalcopyrite growth

Developing high fidelity quantitative models of solid state reaction systems can be challenging, especially in deposition systems where, in addition to the multiple competing processes occurring simultaneously, the solid interacts with its atmosphere. In this work, we develop a model for the growth...

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Bibliographic Details
Main Authors: Robert J. Lovelett, Xueqi Pang, Tyler M. Roberts, William N. Shafarman, Robert W. Birkmire, Babatunde A. Ogunnaike
Format: Article
Language:English
Published: AIP Publishing LLC 2016-04-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4948404