Mechanical Characterization of Torsional Micropaddles Using Atomic Force Microscopy
The reference cantilever method is shown to act as a direct and simple method for determination of torsional spring constant. It has been applied to the characterization of micropaddle structures similar to those proposed for resonant functionalized chemical sensors and resonant thermal detectors. I...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2018-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2018/6160907 |