Integral equations for free-molecule ow in MEMS: recent advancements
We address a Boundary Integral Equation (BIE) approach for the analysis of gas dissipation in near-vacuum for Micro Electro Mechanical Systems (MEMS). Inspired by an analogy with the radiosity equation in computer graphics, we discuss an efficient way to compute the visible domain of integration. Mo...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sciendo
2017-03-01
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| Series: | Communications in Applied and Industrial Mathematics |
| Subjects: | |
| Online Access: | http://www.degruyter.com/view/j/caim.2017.8.issue-1/caim-2017-0004/caim-2017-0004.xml?format=INT |