Dynamic Deposition of Nanocopper Film on the β-SiCp Surface by Magnetron Sputtering
The uniform nanocopper film was deposited on the surface of micron β-SiC particle by magnetron sputtering technology successfully. The surface morphology and phase constitution of the β-SiC particle with nanocopper film were analyzed and dynamic deposition behavior was investigated in detail. The co...
Main Authors: | , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Hindawi Limited
2015-01-01
|
Series: | Journal of Nanomaterials |
Online Access: | http://dx.doi.org/10.1155/2015/810986 |