Structural, electrical and mechanical behavior evaluation of palladium doped diamond like carbon thin films
Pure and palladium (Pd) doped Diamond-like carbon (DLC) thin films have been deposited on glass substrates by using KrF Excimer laser having 248 nm wavelength. The doping concentration of Pd in DLC is 0%, 0.5%, 1.0%, 1.5% and 2.0%. Internal structure, surface morphology, mechanical and electrical ch...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2020-07-01
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Series: | Journal of Materials Research and Technology |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785420312527 |