PHYSICAL PROPERTIES OF InN PARTICLES OBTAINED BY RF MAGNETRON SPUTTERING
InN layers were prepared by magnetron sputtering, in a mixed atmosphere of argon and nitrogen on Si substrates (100), Si (111), and glass. The substrate temperature Ts was varied (300-500 oC) in order to correlate it with the optical, structural, and morphological properties of the layers. X-ray res...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universidad Nacional de Colombia
2014-01-01
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| Series: | Momento |
| Subjects: | |
| Online Access: | https://revistas.unal.edu.co/index.php/momento/article/view/48030 |