Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer

Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer

This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers. First, a nonlinear vibration model of the resonator with comb fingers in a MEMS resonant acceleromete...

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Bibliographic Details
Main Authors: Yan Li, Linke Song, Shuai Liang, Yifeng Xiao, Fuling Yang
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Sensors
Subjects:
nonlinear vibration
uncertainty analysis
sample-based stochastic model
experimental verification
MEMS resonant accelerometer
Online Access:https://www.mdpi.com/1424-8220/20/24/7207

Internet

https://www.mdpi.com/1424-8220/20/24/7207

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